Development of general-purpose dc SQUIDs with sub-micrometer circuit elements
2025-06-18 , Room "Berlin & Oslo"

The dc SQUID is an established application of superconductor technology. The key feature is its sensitivity to physical quantities that can be transduced into magnetic flux threading the SQUID loop. This translates into numerous applications, e.g., low-temperature thermometry or current sensing for electrical metrology. We present superconducting “fine-pitch” signal input coils with sub-micrometer line width and pitch - down to 150 nm, more than an order of magnitude smaller than current state-of-the-art coils - to be integrated into existing Nb/Al-AlOx/Nb-based sensor designs. The aim is to reduce inductive losses of the signal-to-SQUID coupling, without compromising the overall device layout. In a SQUID current sensor, it is crucial to maximize the inductive coupling constant k between the signal input coil and the SQUID loop to achieve a low coupled energy sensitivity εc = (1/k²)xε, where ε is the intrinsic energy sensitivity. Fine-pitch input coils will both increase k and extend the range of input coil inductances for our existing sensor types, up to tens of µH. Under optimum conditions, ε ∝ √LC with L - SQUID loop inductance and C - capacitance associated with the Josephson junctions (JJ). Reducing the JJ area will lower both C and εc. To this end, we are also refining our process to fabricate JJs with sub-micrometer lateral size. This contribution will provide details on the fabrication process and design aspect of the sensors, as well as characterization results.


Affiliation:

Physikalisch-Technische Bundesanstalt

Additional Authors with Affiliation:

Michael Paulsen, Physikalisch-Technische Bundesanstalt
Jörn Beyer, Physikalisch-Technische Bundesanstalt
Oliver Kieler, Physikalisch-Technische Bundesanstalt
Mark Bieler, Physikalisch-Technische Bundesanstalt
Patryk Krzysteczko, Physikalisch-Technische Bundesanstalt
Rainer Körber, Physikalisch-Technische Bundesanstalt